发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER
摘要 A method for manufacturing semiconductor wafer is provided, which includes: heating, so as to dissolve metal material into semiconductor material of the wafer, thereby forming a semiconductor-metal compound; and cooling, so as to inversely melt said semiconductor-metal compound, thereby forming a metal/semiconductor mixture. Said manufacturing method can obtain high-purity wafer which is suitable for semiconductor manufacturing process.
申请公布号 WO2012075735(A1) 申请公布日期 2012.06.14
申请号 WO2011CN71303 申请日期 2011.02.25
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;ZHONG, HUICAI;LIANG, QINGQING;ZHAO, CHAO 发明人 ZHONG, HUICAI;LIANG, QINGQING;ZHAO, CHAO
分类号 H01L31/18;H01L21/322 主分类号 H01L31/18
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