发明名称 Semiconductor device using graphene, and fabricating method for the device
摘要 PURPOSE: A semiconductor device which uses graphene and a manufacturing method thereof are provided to arrange a graphene layer on a pattern layer which is manufactured beforehand, thereby improving on/off current ratio and mobility. CONSTITUTION: A pattern layer(120) is formed on a substrate(110) into a predetermined shape. A graphene layer(130) is formed on the pattern layer in a predetermined direction. A passivation layer(140) is formed on the graphene layer. An electrode layer(150) is formed on a predetermined region of the graphene layer. An insulating film layer(160) is formed between the substrate and the graphene layer.
申请公布号 KR101150270(B1) 申请公布日期 2012.06.12
申请号 KR20110007951 申请日期 2011.01.26
申请人 发明人
分类号 H01L29/778;H01L21/335 主分类号 H01L29/778
代理机构 代理人
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