发明名称 PIEZOELECTRIC VIBRATING DEVICE, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC VIBRATOR, AND PIEZOELECTRIC OSCILLATOR
摘要 PURPOSE: A piezoelectric vibrating device, a manufacturing method thereof, a piezoelectric vibrator, and a piezoelectric oscillator are provided to reduce a frequency difference between the piezoelectric vibrating device and a vibration gyro by arranging a slit for controlling a frequency. CONSTITUTION: Rod shaped vibration arms(15a,15b) are separately arranged. A base(12) is connected to the end of one side of the vibration arm. A plumb unit(20a,20b) is connected to the end of other side of the vibration arm. A slit for controlling a frequency is linearly formed along the longitudinal direction of the vibration arm in the plumb unit. Groove units(17a,17b) are formed on the surface and the rear of the vibration arm.
申请公布号 KR20120060767(A) 申请公布日期 2012.06.12
申请号 KR20110128147 申请日期 2011.12.02
申请人 SEIKO EPSON CORPORATION 发明人 YAMADA AKINORI
分类号 H01L41/09 主分类号 H01L41/09
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