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发明名称
旋涂玻璃组合物及使用其于半导体制程中形成二氧化矽层之方法
摘要
本发明揭示一种旋涂玻璃(SOG)组合物及使用该SOG组合物形成一二氧化矽层之方法。该方法包括在具有一表面间断性之一半导体基板上,涂布包含聚矽氮烷之一SOG组合物以形成一平坦的SOG层,该聚矽氮烷之化合物化学式为-(SiH2NH)n-,其中n表示一正整数,其重量平均分子量在约3,300至3,700范围内。藉由固化该SOG层而将该SOG层转换成具有一平坦表面之一二氧化矽层。还揭示一种藉由该方法而制作的半导体装置。
申请公布号
TWI365889
申请公布日期
2012.06.11
申请号
TW093122287
申请日期
2004.07.26
申请人
三星电子股份有限公司 南韩
发明人
李祯浩;赵俊贤;崔晶植;李东峻
分类号
C08G77/00
主分类号
C08G77/00
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
南韩
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