WAVEFRONT ERROR MEASUREMENT DEVICE SENSITIVE TO POLARIZATION EFFECT AND MEASUREMENT METHOD USING THE SAME

摘要

PURPOSE: A wave front error measuring device which is sensitive to a polarization effect and a measuring method using the same are provided to measure an accurate wave front errors of a measurement sample by selectively arranging a half-wave plate and a quarter-wave plate on an optical path of a wave front error measuring device. CONSTITUTION: A wave front error measuring device which is sensitive to a polarization effect comprises a light generator(100), an isolator(200), a focusing lens(300), a beam splitter(400), and a photo detector(500). The light generator generates polarized lights. The lights generated by the light generator pass through the isolator. The focusing lens collects the reflected lights after h passing through the isolator.