| 摘要 |
PURPOSE: A hydrogen sensor and manufacturing method thereof are provided to form a thin film into a form having a nano gap capable of detecting hydrogen gas, thereby mass-producing a hydrogen sensor of high performance at low casts in a short time. CONSTITUTION: A hydrogen sensor manufacturing method is as follows. A PdxNi1-x alloy thin film, satisfying with this equation; 0.85<=x<=0.96, is formed on a surface of an elastic substrate. A plurality of nano gaps is formed in the alloy thin film formed on the surface of the elastic substrate by adding a tensile force to the elastic substrate. The thin film is pressed in a direction perpendicular to a direction where the tensile force actuates when adding the tensile force The thin film is pressed in a direction where the tensile force is returned when the tensile force is returned and extended to a direction perpendicular to the direction where the tensile force is returned so that the nano gaps are formed.
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