发明名称 |
CONTACT MANUFACTURING MATHOD FOR SEMICONDUCTOR TESTER |
摘要 |
<p>PURPOSE: A contact manufacturing method for testing a semiconductor device is provided to determine a pitch gap according to a cut width and a thickness of a conductor layer and an insulator layer, thereby effectively reducing the pitch gap. CONSTITUTION: An insulator layer(2) and a conductor layer(1) are consecutively and repeatedly laminated(S1). A first laminated material is vertically cut with a fixed thickness based on a side surface. A first cut body(M1) is acquired by consecutively and repeatedly forming a full-width insulator part(21) and a full-width conductor part(11) in a longitudinal direction. The first cut body and the insulator layer are consecutively and repeatedly laminated(S3). A second laminated material is vertically cut with a fixed thickness based on a front surface. A second cut body(M2) is acquired by consecutively forming the full-width insulator part, a partial-width insulator part(20), and a partial-width conductor part(10) in the longitudinal direction(S4).</p> |
申请公布号 |
KR101150762(B1) |
申请公布日期 |
2012.06.08 |
申请号 |
KR20110106832 |
申请日期 |
2011.10.19 |
申请人 |
SILICONE VALLEY CO., LTD. |
发明人 |
YOUN, KYUNG SEOB |
分类号 |
G01R1/067;G01R31/26;G01R31/28 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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