INSPECTION SYSTEM AND METHOD FOR FAST CHANGES OF FOCUS

摘要

PROBLEM TO BE SOLVED: To provide an inspection system capable of achieving fast focus changes.

SOLUTION: An inspection system includes a first focusing unit 40 that executes fast focus changes to a first focusing function applied to an incident light beam. A moving lens acousto-optic unit 50 receives a light beam focused by the first focusing function and uses multiple moving lenses generated in response to a radio-frequency signal to form a focused spot. The moving lenses apply a second focusing function, and the moving lens acousto-optic unit changes the second focusing function at a fast rate. The inspection system also includes an optical element that leads the focused spot to a position on an inspected object and leads emission from an inspected object 200 to a sensor.

COPYRIGHT: (C)2012,JPO&INPIT