AFM-SECM sensor

摘要

The invention discloses an atomic force microscopy-scanning electrochemical microscopy (AFM-SECM) sensor comprising an AFM tip on an AFM cantilever, with a conductive layer on the AFM tip which forms a conductive AFM tip and wherein said conductive tip is connected to a contact region on the cantilever, said contact region providing the contact site for delivering the measurement signal to the measurement system, wherein said conductive layer is covered by an insulating layer except for the immediate tip and the contact region, wherein said insulating layer is covered by a conductive protection layer, and wherein, due to a cavity between the conductive protection layer and the conductive AFM tip, said cavity being formed by the absence or by removal of a tip located portion of the insulating layer, a ring or cylinder electrode forms with the conductive protection layer around the conductive AFM tip, and methods for producing such sensors.