| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxygen partial pressure controlling method capable of reducing an oxygen partial pressure with high operating efficiency. <P>SOLUTION: In the oxygen partial pressure controlling method to purify an oxygen-containing gas to an ultra low oxygen pressure gas by an oxygen pump, an operation temperature of a solid electrolyte 211 in the oxygen pump 21 is set to a high temperature when an oxygen partial pressure of a purification target gas is high, while the operation temperature of the solid electrolyte 211 is set to a lower temperature when an oxygen partial pressure of the purification target gas is lowered. <P>COPYRIGHT: (C)2012,JPO&INPIT |
