PREDICTIVE MAINTENANCE FOR THIRD PARTY SUPPORT EQUIPMENT
摘要
A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.
申请公布号
WO2012075144(A2)
申请公布日期
2012.06.07
申请号
WO2011US62652
申请日期
2011.11.30
申请人
APPLIED MATERIALS, INC.;SWYERS, JOHN R.;YEDATORE, MANJUNATH;DAVIS, TONY L.;TURNER, DONN;JOHNSON, MICHAEL W.
发明人
SWYERS, JOHN R.;YEDATORE, MANJUNATH;DAVIS, TONY L.;TURNER, DONN;JOHNSON, MICHAEL W.