发明名称 PREDICTIVE MAINTENANCE FOR THIRD PARTY SUPPORT EQUIPMENT
摘要 A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.
申请公布号 WO2012075144(A2) 申请公布日期 2012.06.07
申请号 WO2011US62652 申请日期 2011.11.30
申请人 APPLIED MATERIALS, INC.;SWYERS, JOHN R.;YEDATORE, MANJUNATH;DAVIS, TONY L.;TURNER, DONN;JOHNSON, MICHAEL W. 发明人 SWYERS, JOHN R.;YEDATORE, MANJUNATH;DAVIS, TONY L.;TURNER, DONN;JOHNSON, MICHAEL W.
分类号 G05B23/00 主分类号 G05B23/00
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