| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electro-optic device capable of preventing the occurrence of defects, such as hillock resulting from heat stress, on the surface of a pixel electrode, and to provide a projection type display device using the electro-optic device. <P>SOLUTION: In an element substrate 10 of an electro-optic device 100, a stress relaxation film 46 formed from a doped silicon oxide film is formed between a third interlayer insulation film 44 formed from non-doped silicon oxide film and a pixel electrode 9a formed from an aluminum film or the like. The stress relaxation film 46 is formed from a doped silicon oxide film, disposed in contact with the third interlayer insulation film 44 while having a thermal expansion coefficient different from that of the third interlayer insulation film 44, and also in contact with the pixel electrode 9a while having a thermal expansion coefficient different from that of the pixel electrode 9a. The thermal expansion coefficient of each layer has the following relation: the third interlayer insulation film 44<stress relaxation film 46<pixel electrode 9a. Accordingly, the stress relaxation film 46 relaxes the difference in thermal expansion coefficient between the third interlayer insulation film 44 and the pixel electrode 9a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
