| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical module that allows impedance to be optimally controlled by adjusting a distance between a signal metal wiring and a ground surface. <P>SOLUTION: An optical module includes: a groove 1a for an optical path formed on a surface of a first substrate 1 being a silicon substrate; a mirror part 15 formed at the tip end part of the groove 1a for the optical path and used for optical path conversion; and an external waveguide 2 located at the vicinity of the rear end part of the groove 1a for the optical path. Also, the optical module includes a light emitting element 12a which is mounted on the surface of the first substrate 1 so as to face the mirror part 15, and emits an optical signal through the mirror part 15 to the external waveguide 2 or receives an optical signal through the mirror part 15 from the external waveguide 2. A signal wiring 30s of the light emitting element 12a is constituted by a metal wiring, and is disposed so as to have a ground surface 30g separated by a prescribed distance L relative to the signal wiring 30s. <P>COPYRIGHT: (C)2012,JPO&INPIT |
