| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent failure of a substrate bonding device by managing the identification information of a substrate holder. <P>SOLUTION: The substrate bonding device which bonds a plurality of substrates comprises a plurality of substrate holders which hold a plurality of substrates, respectively, and are assigned with unique identification information, a section which bonds the plurality of substrates held by the plurality of substrate holders, a recognition section which recognizes the identification information assigned to the plurality of substrate holders, and an output section which outputs the fact when the identification information recognized by the recognition section is duplicated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
