| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide transfer equipment capable of preventing an object to be molded from generating bubbles upon transfer, reducing pressing force for transfer, and easily separating the object to be molded from a mold. <P>SOLUTION: Transfer equipment comprises on a plane surface in a lower part of a beam positioned above a base member: a portal frame capable of holding a substrate; a first moving member movable in a Y-axis direction of the base member; a second moving member movable in a X-axis direction of the first moving member; a third moving member movable in a Z-axis direction of the second moving member; first driving means for moving the first moving member; second driving means for moving the third moving member; a mold holding body supported by the third moving member in a swingable manner at a swinging center axis in the inside of a convex surface of the body; urging means for urging the mold holding body in one direction around the swinging center axis; an actuator for swinging the mold holding body in an opposite direction from the one direction; and to-be-mold layer providing means for providing a thin film layer to be molded on a surface on which a transfer pattern corresponding to a mold held by the mold holding body has been formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
