摘要 |
Bulk acoustic wave (BAW) gyroscopes purposefully operate using non-degenerate modes, i.e., resonant frequencies of drive and sense modes are controlled so they are not identical. The resonant frequencies differ by a small controlled amount (??). The difference (??) is selected such that the loss of sensitivity, as a result of using non-degenerate modes, is modest. Non-degenerate operation can yield better bandwidth and improves signal-to-noise ratio (SNR) over comparable degenerate mode operation. Increasing Q of a BAW resonator facilitates trading bandwidth for increased SNR, thereby providing a combination of bandwidth and SNR that is better than that achievable from degenerate mode devices. In addition, a split electrode configuration facilitates minimizing quadrature errors in BAW resonators. |
申请人 |
ANALOG DEVICES, INC.;JUDY, MICHAEL, W.;GEEN, JOHN, A.;JOHARI-GALLE, HOURI |
发明人 |
JUDY, MICHAEL, W.;GEEN, JOHN, A.;JOHARI-GALLE, HOURI |