发明名称 SPUTTERING TARGET, AND RECORDING MATERIAL OF MAGNETIC RECORDING MEDIUM FORMED FROM THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a sputtering target that improves signal-noise ratio of a magnetic recording medium and obtains a recording layer in which surface recording density is increased, and to provide a recording material of the magnetic recording medium formed from the sputtering target. <P>SOLUTION: The sputtering target contains an alloy based on CoPt or CoCrPt or CoCrPtB and a combination of oxides, where the combination of oxides includes CuO and at least one oxide selected from TiO<SB POS="POST">2</SB>, Cr<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, Ta<SB POS="POST">2</SB>O<SB POS="POST">5</SB>, Nb<SB POS="POST">2</SB>O<SB POS="POST">5</SB>, Y<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, ZrO<SB POS="POST">2</SB>and HfO<SB POS="POST">2</SB>. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012107334(A) 申请公布日期 2012.06.07
申请号 JP20110237877 申请日期 2011.10.28
申请人 SOLAR APPLIED MATERIALS TECHNOLOGY CORP 发明人 ROU SHEANG-HSIEN;LIU WEN-TSANG;LIN SHOU-HSIEN
分类号 C23C14/34;C04B35/00;C22C19/07;C22C32/00;G11B5/851 主分类号 C23C14/34
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