发明名称 PIEZOELECTRIC ELEMENT MANUFACTURING METHOD AND MOTHER PIEZOELECTRIC SUBSTRATE WITH ELECTRODE ATTACHED
摘要 Provided is a method of manufacturing a piezoelectric element with which it is possible to reliably distinguish a first and second primary face in a mother piezoelectric substrate state from outward appearances. The method of manufacturing the piezoelectric element comprises the steps of: forming a first electrode (2) on a first primary face (1a) of a mother piezoelectric substrate (1); and forming a second electrode (3) on a second primary face (1b). The method further comprises the steps of: when forming the first electrode (2) and the second electrode (3), disposing notches (2a, 2b, 3a, 3b) on the first electrode (2) and the second electrode (3) such that the shapes of the first electrode (2) and the second electrode (3) differ when turning over the mother piezoelectric substrate (1), forming the first electrode (2) and the second electrode (3) such that the shapes thereof are identical except for the portions whereupon the notches (2a, 2b, 3a, 3b) are disposed, and polarizing the mother piezoelectric substrate (1) after forming the first and second electrodes (2, 3); retaining the mother piezoelectric substrate (1) in a retaining member (4) such that the notches can be observed from an external viewpoint; and with the mother piezoelectric substrate (1) in the retained state, dividing the mother piezoelectric substrate (1) into individual piezoelectric elements.
申请公布号 WO2012073623(A1) 申请公布日期 2012.06.07
申请号 WO2011JP74836 申请日期 2011.10.27
申请人 MURATA MANUFACTURING CO., LTD.;NISHIMURA, TOSHIO;NISHIKAWA, MASANAGA;SASHISAKI, KAZUHIKO 发明人 NISHIMURA, TOSHIO;NISHIKAWA, MASANAGA;SASHISAKI, KAZUHIKO
分类号 H01L41/09;H01L41/187;H01L41/257;H01L41/29;H01L41/338;H03H3/02;H03H9/17 主分类号 H01L41/09
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