| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a long, dense cylindrical target for ceramic spraying showing good adhesion to a backing tube, with small energy consumption and heat load. <P>SOLUTION: The manufacturing method comprises successively carrying out a step of forming a ceramic layer in individual spraying zones of the backing tube evenly divided in the longitudinal direction, wherein the ceramic layer is formed by continuously repeating transfer of a thermal spraying gun in the longitudinal direction several times in each spraying zone. <P>COPYRIGHT: (C)2012,JPO&INPIT |
