发明名称 ORGANIC VAPOR JET PRINTING DEVICE WITH A CHILLER PLATE
摘要 A device is provided. The device includes a nozzle, a source of carrier gas and a source of organic molecules in fluid communication with the nozzle. The device also includes an active cooling system disposed adjacent to the nozzle. Preferably, the device also includes a chamber, wherein the nozzle, and the active cooling system are disposed within the chamber. A substrate holder may also be disposed within the chamber, adapted to support a substrate beneath the nozzle, movable relative to the nozzle. Preferably, a substrate is held by the substrate holder, the substrate disposed at a distance of 0.1 to 10 mm from the active cooling system. Preferably, the device also includes a heating system attached to the nozzle. The points at which the heating system are attached to the nozzle preferably includes at least one point that is zero to 5 mm from the tip of the nozzle.
申请公布号 KR20120058591(A) 申请公布日期 2012.06.07
申请号 KR20127008157 申请日期 2010.09.02
申请人 UNIVERSAL DISPLAY CORPORATION 发明人 BURROWS PAUL E.;MOHAN SIDDHARTH HARIKRISHNA
分类号 C23C14/12;C23C14/56 主分类号 C23C14/12
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