Method for operating projection exposure apparatus, involves canceling impact of corrected expansion coefficients on aberrations of image of object, relative to effect of non-correctable expansion coefficients on aberrations of image

摘要

The method involves determining wavefront deviation of incident wave in projection lens (24), and performing polynomial expansion of wavefront deviation to determine expansion coefficients. A portion of expansion coefficients are corrected. The lens is set in image plane (34) to obtain image of object (44). The aberrations on the image are determined by using expansion coefficients. The impact of corrected expansion coefficients on aberrations of image is canceled relative to the effect of non-correctable expansion coefficients on aberrations of image. An independent claim is included for projection exposure apparatus.