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发明名称
CLEANING OF A PROCESS CHAMBER
摘要
申请公布号
EP2459767(A1)
申请公布日期
2012.06.06
申请号
EP20100724707
申请日期
2010.05.28
申请人
LEYBOLD OPTICS GMBH
发明人
BECKMANN, RUDOLF;GEISLER, MICHAEL;ROST, HARALD
分类号
C23C16/44;B08B7/00;H01J37/32
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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