APPARATUS FOR INSPECTING SUBSTRATE,申请号KR20090125342-传众专利搜索

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发明名称	APPARATUS FOR INSPECTING SUBSTRATE
摘要	<p>본 발명에 의한 기판검사장치는 검사영역과 마진영역이 형성된 기판을 검사하는 장치에 있어서, 상기 기판을 부상시키는 스테이지; 및 상기 기판의 검사영역을 검사하는 비전카메라;를 포함하며, 상기 스테이지는 상기 비전카메라의 검사구간에 슬릿이 형성되고, 상기 슬릿의 양단에는 상기 기판의 마진영역을 부상시키는 보조스테이지가 더 구비된다.</p>
申请公布号	KR101150397(B1)	申请公布日期	2012.06.01
申请号	KR20090125342	申请日期	2009.12.16
申请人		发明人
分类号	G01B11/24;H05K13/02;H05K13/08	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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