| 摘要 |
<p>PURPOSE: A substrate processing system is provided to increase process speed of a substrate treatment process by connecting two or more transfer modules using a connection module. CONSTITUTION: The number of transfer modules(100) is two or more. Two or more process modules(200) are combined with each transfer module. A connection module(300) connects two adjacent transfer modules among the transfer modules. The connection module exchanges the transfer module and a substrate. The substrate is temporarily stored in the connection module.</p> |
