| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum cooling device which can optimally control the temperature of cooling water to be supplied to a heat exchanger 11. <P>SOLUTION: The vacuum cooling device includes: a processing tank 2 which stores an object to be cooled; a vacuum producing device 1 which is connected with the processing tank and sucks air in the processing tank; the heat exchanger 11 which cools the air sent from the processing tank to the vacuum producing device; a cool water unit 15 which cools the cooling water to be supplied to the heat exchanger; and a water tank 3/4 which stores the cooling water after performing heat exchange by means of the heat exchanger and performs water feed to the cool water unit; wherein the cooling of the object to be cooled is performed by evacuating air in the processing tank. In the vacuum cooling device, the water tank is disposed to be divided into a high-temperature side water tank 3 for supplying the cooling water of a relatively high temperature to the cool water unit and a low-temperature side water tank 4 for supplying the cooling water of a relatively low temperature to the cool water unit and the temperature of the cooling water to be sent to the heat exchanger is adjusted by adjusting the supply proportion of the cooling waters having different temperatures. <P>COPYRIGHT: (C)2012,JPO&INPIT |
