发明名称 SINGLE CRYSTAL PULLING DEVICE AND LOW HEAT CONDUCTIVE MEMBER TO BE USED IN SINGLE CRYSTAL PULLING DEVICE
摘要 Provided is a single metal crystal pulling device which can prevent a heat loss from a crucible rotation axis to the outside of a furnace and can be produced at a lower cost. The single crystal pulling device (1) comprises: a quartz crucible (2) for storing therein silicon melt (3); a graphite crucible (4) for supporting the quartz crucible (2); a receiver (5) for fixing and supporting the graphite crucible (4) at the lower part thereof; and a crucible rotation axis (6) for supporting the receiver (5) at the lower part thereof and rotating and moving up and down the receiver (5) and the crucibles (2,4). A low heat conductive member (10) is interposed between the bonding surfaces of the receiver (5) and the crucible rotation axis (6). The low heat conductive member (10), which has a roughly tubular shape, is provided in such a manner that a convex portion of the crucible rotation axis (6) is inserted into a hole at the center of the low heat conductive member (10). Thus, a space (11) is formed below the bottom of the receiver (5).
申请公布号 WO2012070528(A1) 申请公布日期 2012.05.31
申请号 WO2011JP76798 申请日期 2011.11.21
申请人 TOYO TANSO CO., LTD.;OKADA, OSAMU;KAWAKAMI, MASAAKI 发明人 OKADA, OSAMU;KAWAKAMI, MASAAKI
分类号 C30B15/10;C04B35/83;C30B29/06 主分类号 C30B15/10
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