发明名称 |
SINGLE CRYSTAL PULLING DEVICE AND LOW HEAT CONDUCTIVE MEMBER TO BE USED IN SINGLE CRYSTAL PULLING DEVICE |
摘要 |
Provided is a single metal crystal pulling device which can prevent a heat loss from a crucible rotation axis to the outside of a furnace and can be produced at a lower cost. The single crystal pulling device (1) comprises: a quartz crucible (2) for storing therein silicon melt (3); a graphite crucible (4) for supporting the quartz crucible (2); a receiver (5) for fixing and supporting the graphite crucible (4) at the lower part thereof; and a crucible rotation axis (6) for supporting the receiver (5) at the lower part thereof and rotating and moving up and down the receiver (5) and the crucibles (2,4). A low heat conductive member (10) is interposed between the bonding surfaces of the receiver (5) and the crucible rotation axis (6). The low heat conductive member (10), which has a roughly tubular shape, is provided in such a manner that a convex portion of the crucible rotation axis (6) is inserted into a hole at the center of the low heat conductive member (10). Thus, a space (11) is formed below the bottom of the receiver (5). |
申请公布号 |
WO2012070528(A1) |
申请公布日期 |
2012.05.31 |
申请号 |
WO2011JP76798 |
申请日期 |
2011.11.21 |
申请人 |
TOYO TANSO CO., LTD.;OKADA, OSAMU;KAWAKAMI, MASAAKI |
发明人 |
OKADA, OSAMU;KAWAKAMI, MASAAKI |
分类号 |
C30B15/10;C04B35/83;C30B29/06 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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