发明名称 |
LAPPING CARRIER AND METHOD |
摘要 |
Provided is a lapping carrier including a base carrier having a first major surface, a second major surface and at least one aperture for holding a workpiece. The aperture extends from the first major surface through the base carrier to the second major surface. The base carrier includes a first metal or a polymer. At least a portion of the first major surface or at least a portion of each of the first and the second major surfaces includes a polymeric region. In at least a portion of the polymeric region, at least one adhesion promoting layer is interposed between the polymeric region and the base carrier. The adhesion promoting layer includes an inorganic coating. |
申请公布号 |
US2012135669(A1) |
申请公布日期 |
2012.05.31 |
申请号 |
US201213367424 |
申请日期 |
2012.02.07 |
申请人 |
FLETCHER TIMOTHY D.;CHRISTIANSON TODD J.;ROMERO VINCENT D.;SVENTEK BRUCE A.;3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
FLETCHER TIMOTHY D.;CHRISTIANSON TODD J.;ROMERO VINCENT D.;SVENTEK BRUCE A. |
分类号 |
B24B37/28;B24B1/00;B24B37/04;B24B37/30 |
主分类号 |
B24B37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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