BUMP FOR SEMICONDUCTOR DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME
摘要
PURPOSE: A bump for a semiconductor device and a manufacturing method thereof are provided to prevent crack generation by coating a separate polymer film on the bump formed on a semiconductor chip into one body. CONSTITUTION: An opening part for exposing a metal pad(14) on a photo resist layer(22) is formed. A copper filler(32) of a predetermined height is formed on the exposed metal pad through a plating process. A conductive solder(34) is formed on the upper surface of the copper filler through the plating process. A reflow process with respect to the conductive solder is performed. The remaining photo resist layer which excludes a part of the photo resist layer which is performed as a polymer film(20) is removed.
申请公布号
KR20120054756(A)
申请公布日期
2012.05.31
申请号
KR20100116029
申请日期
2010.11.22
申请人
AMKOR TECHNOLOGY KOREA, INC.
发明人
LEE, SANG MOK;KIM, IN TAE;KIM, YOON JOO;PARK, SUNG SU;LEE, JEONG SEOK;PARK, JIN WOO