发明名称 A METHOD AND AN APPARATUS FOR FORMING ELECTRICALLY CONDUCTIVE VIAS IN A SUBSTRATE, AN AUTOMATED ROBOT-BASED MANUFACTURING SYSTEM, A COMPONENT COMPRISING A SUBSTRATE WITH VIA HOLES, AND AN INTERPOSER DEVICE
摘要 <p>A method for forming conductive vias in a substrate (302) by filling preformed via holes (303-305), preferably through via holes, with conductive material, comprises providing a plurality of preformed objects at least partly comprising ferromagnetic material (301) on a surface of the substrate;providing a magnetic source (307) on an opposite side of the substrate with respect to the plurality of preformed objects, thereby at least partly aligning at least a portion of the preformed objects with a magnetic field associated with the magnetic source; and moving the magnetic source relative the substrate, or vice versa, thereby moving the at least portion of the preformed objects into at least a portion of the via holes.</p>
申请公布号 WO2012071002(A1) 申请公布日期 2012.05.31
申请号 WO2011SE51396 申请日期 2011.11.21
申请人 FISCHER, ANDREAS;STEMME, GOERAN;NIKLAUS, FRANK 发明人 FISCHER, ANDREAS;STEMME, GOERAN;NIKLAUS, FRANK
分类号 H01L21/768;H01L21/48;H05K3/40 主分类号 H01L21/768
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