发明名称 |
A METHOD AND AN APPARATUS FOR FORMING ELECTRICALLY CONDUCTIVE VIAS IN A SUBSTRATE, AN AUTOMATED ROBOT-BASED MANUFACTURING SYSTEM, A COMPONENT COMPRISING A SUBSTRATE WITH VIA HOLES, AND AN INTERPOSER DEVICE |
摘要 |
<p>A method for forming conductive vias in a substrate (302) by filling preformed via holes (303-305), preferably through via holes, with conductive material, comprises providing a plurality of preformed objects at least partly comprising ferromagnetic material (301) on a surface of the substrate;providing a magnetic source (307) on an opposite side of the substrate with respect to the plurality of preformed objects, thereby at least partly aligning at least a portion of the preformed objects with a magnetic field associated with the magnetic source; and moving the magnetic source relative the substrate, or vice versa, thereby moving the at least portion of the preformed objects into at least a portion of the via holes.</p> |
申请公布号 |
WO2012071002(A1) |
申请公布日期 |
2012.05.31 |
申请号 |
WO2011SE51396 |
申请日期 |
2011.11.21 |
申请人 |
FISCHER, ANDREAS;STEMME, GOERAN;NIKLAUS, FRANK |
发明人 |
FISCHER, ANDREAS;STEMME, GOERAN;NIKLAUS, FRANK |
分类号 |
H01L21/768;H01L21/48;H05K3/40 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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