| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve processing quality and achieve a long service life of a blade in the following manner: a liquid filled with air bubbles and a gas and sprayed droplets are coagulated in advance by freezing, and spacial gaps of a workpiece having recessed and projecting parts formed by a low dielectric film or a metal film on the surface thereof are completely filled up to form a coagulated body film, and a spreadable metal film material is made brittle and the recessed and projecting parts of the low dielectric film or the metal film are filled when dicing to suppress peeling of the low dielectric film and formation of metal burrs. <P>SOLUTION: This device for dicing a workpiece includes the liquid infiltrating into the recessed and projecting parts on the surface, a liquid application means 4a for applying the liquid onto the top face of the workpiece 2, freezing means 14 for coagulating the liquid on the workpiece 2 by freezing the workpiece 2 applied with the liquid, a dicing table 3 for placing the workpiece 2, a blade 5 for dicing the workpiece 2 with the recessed and projecting parts formed by the low dielectric film or the metal film on the surface of the workpiece 2 filled with a coagulated body 11, and coagulated body melting means 14 for melting the coagulated body 11 on the workpiece 2 posterior to dicing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
