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经营范围
发明名称
PLASMA ETCHING SYSTEM
摘要
申请公布号
JPH04107822(A)
申请公布日期
1992.04.09
申请号
JP19900226186
申请日期
1990.08.28
申请人
NEC CORP
发明人
KARITA YUTAKA
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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