SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing device that allows a controlling controller at a transmission side to transmit a notification message one after another even if a massive amount of events occur in a short time.

SOLUTION: A substrate processing device 1a-1n comprises: a plurality of controlling controllers; an actuator controlled by the controlling controllers and for performing a prescribed step; a sensor for detecting the execution state of the step; and a communication control unit 51 for performing prescribed processing to a message including a detection result from the sensor and for transmitting the processed message. The communication control unit includes: a reception message processing unit for performing prescribed message processing; and a transmission message processing unit for receiving the detection result from the sensor and for giving notice to the reception message processing unit. The reception message processing unit includes temporary storage means for storing the message temporarily.

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