Computer generated hologram, exposure apparatus and device fabrication method

摘要

A computer generated hologram includes a plurality of cells which form a light intensity distribution on a predetermined plane. The plurality of cells includes a plurality of first cells including isotropic media and anisotropic media, and a plurality of second cells including anisotropic media alone. The plurality of cells change a phase of incident light which impinges on each of the plurality of cells to form a phase distribution including N phases (N is the number of phases, N≧2) for each of a wavefront of a linearly polarized light component in a first direction and a wavefront of a linearly polarized light component in a second direction perpendicular to the first direction.