发明名称 METHOD FOR PRODUCTION OF BEAM OF ATOMS OR MOLECULES IN GLOW DISCHARGE AND DEVICE FOR METHOD IMPLEMENTATION
摘要 FIELD: electricity. ^ SUBSTANCE: by way of power voltage supply between the mesh cathode and anode one allows a high-voltage discharge in a gas-discharge cell, in the high field of cathode potential drop one accelerates ions being used in the processes of recharging for production of an atom or molecule beam that is directed and released through the mesh cathode into the atom or molecule beam drift region. One provides for additional ions inflow into the interspace between the mesh cathode and anode which is ensured by way of additional gas ionisation near the mesh cathode surface by an accessory electron beam the electrons whereof are accelerated in the high field of high-voltage discharge. Additionally one proposes a device for the method implementation. ^ EFFECT: order of magnitude increase of the atom or molecule beam flow intensity. ^ 4 cl, 6 dwg
申请公布号 RU2452056(C1) 申请公布日期 2012.05.27
申请号 RU20100150980 申请日期 2010.12.13
申请人 UCHREZHDENIE ROSSIJSKOJ AKADEMII NAUK INSTITUT FIZIKI POLUPROVODNIKOV IM. A.V. RZHANOVA SIBIRSKOGO OTDELENIJA RAN (IFP SO RAN) 发明人 SOROKIN ALEKSANDR RAZUMNIKOVICH
分类号 H01J3/02 主分类号 H01J3/02
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