| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration control apparatus advantageous to control of a low-frequency vibration and to its manufacture. <P>SOLUTION: A detection system detecting a position of a first object in the vibration control apparatus controlling the vibration of the first object includes: a second object; a second spring mechanism supporting the second object; a third object supporting the second spring mechanism; a third spring mechanism supporting the third object; a first displacement detector detecting a displacement of the third object to the second object; a second driving means applying force upon the third object; and a second calculator creating a command value to a second driving means, based on an output of the first displacement detector so that the third object is not displaced to the second object. A second natural frequency of a second system consisting of the second object and the second spring mechanism, is higher than a first natural frequency of a first system consisting of the first spring mechanism supporting the first object and the first object. A third natural frequency of a third system consisting of the third object and the third spring mechanism, is higher than the first natural frequency, and the position of the first object to at least either of the second and third objects is detected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
