SUBSTRATE-TRANSFER APPARATUS AND SUBSTRATE-TRANSFER METHOD USING SAME

摘要

The present invention relates to a substrate transfer apparatus. The substrate transfer apparatus, which is configured to transfer a substrate when the substrate is vertically fixed, includes: a pair of support brackets arranged in parallel and spaced apart from each other by a predetermined distance; a drive shaft on which a plurality of driving gears are disposed at a predetermined distance along a shaft direction of the drive shaft, the drive shaft being disposed in a length direction of one bracket from the pair of support brackets; a plurality of driven shafts disposed perpendicularly to the driving shaft between the pair of support brackets, wherein driven gears, which engage with the driving gears, respectively, are disposed on one side of the plurality of driven shafts; at least one support roller fixed to the driven shafts, wherein the at least one support roller is rotatably interlocked with the driven shafts; and a jig seated on the support roller and transferred by the support roller. The surface of the jig is coated with a coating material. The coating material includes either Teflon or Raydent.