| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation detection element with an improved resolution property and a manufacturing method thereof, a radiation detection module, and a radiation image diagnostic device. <P>SOLUTION: A vapor deposition material heated and vaporized is guided to a vapor deposition container (plate) 41 having plural discharge holes 41A1 to 41An, 41B1 to 41Bm and the vapor deposition material is discharged from the plural discharge holes 41A1 to 41An, 41B1 to 41Bm for vapor deposition to a sensor substrate 11, thereby reducing variation in growth and distribution of columnar crystal constituting a scintillator layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
