| 发明名称 |
TRENCH CAPACITOR STRUCTURES AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
A trench capacitor structure is provided. The trench capacitor structure includes a substrate, a trench formed in the substrate, a plurality of scallops formed in the sidewalls of the trench, and at least one capacitor formed within at least one of the scallops. The disclosure also provides a method of manufacturing the trench capacitor structure.
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| 申请公布号 |
US2012127625(A1) |
申请公布日期 |
2012.05.24 |
| 申请号 |
US20100966996 |
申请日期 |
2010.12.13 |
| 申请人 |
WANG CHUNG-CHIH;KU TZU-KUN;LIN CHA-HSIN;TZENG PEI-JER;HO CHI-HON;INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
WANG CHUNG-CHIH;KU TZU-KUN;LIN CHA-HSIN;TZENG PEI-JER;HO CHI-HON |
| 分类号 |
H01G4/00;H01G7/00 |
主分类号 |
H01G4/00 |
| 代理机构 |
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