| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acoustic wave element in which the electrical resistance can be decreased by providing an electrode part on which a conductive auxiliary layer is laminated without causing an increase in size, and variation in the step on the surface of a dielectric layer covering the electrode or the film thickness of the dielectric layer can be reduced. <P>SOLUTION: In the acoustic wave element 11, an IDT electrode 3 and a dielectric layer 10 are formed on a piezoelectric substrate 1, and the IDT electrode 3 has electrode fingers 6, 7, and bus bars 4, 5 continuous to the electrode fingers 6, 7, respectively. A conductive auxiliary layer 2 is provided to be laminated on at least a part of the bus bars 4, 5, and the conductive auxiliary layer 2 fills grooves 1c, 1d formed in the upper surface 1a of the piezoelectric substrate 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
