ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME,申请号KR20080011858-传众专利搜索

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发明名称	ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME
摘要
申请公布号	KR100961921(B1)	申请公布日期	2010.06.10
申请号	KR20080011858	申请日期	2008.02.05
申请人		发明人
分类号	H01L21/68;H02N13/00	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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