发明名称 |
STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a storage device with a high reliability and a method of manufacturing the same. <P>SOLUTION: The method of manufacturing the semiconductor device according to an embodiment comprises the steps of: forming a nanomaterial assembly layer formed of a plurality of minute conductors assembled with gaps in between; forming a first electrode layer by depositing a conductive material on the nanomaterial assembly layer by means of a first method by which a coverage becomes relatively low; and forming a second electrode layer by depositing a conductive material on the first electrode layer by means of a second method by which a coverage becomes relatively high. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012099659(A) |
申请公布日期 |
2012.05.24 |
申请号 |
JP20100246525 |
申请日期 |
2010.11.02 |
申请人 |
TOSHIBA CORP |
发明人 |
AOYAMA KENJI;YAMAMOTO KAZUHIKO;ISHIKAWA SATOSHI;OSHINO SHIGETO |
分类号 |
H01L27/105;H01L27/28;H01L45/00;H01L51/05;H01L51/30 |
主分类号 |
H01L27/105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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