发明名称 STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a storage device with a high reliability and a method of manufacturing the same. <P>SOLUTION: The method of manufacturing the semiconductor device according to an embodiment comprises the steps of: forming a nanomaterial assembly layer formed of a plurality of minute conductors assembled with gaps in between; forming a first electrode layer by depositing a conductive material on the nanomaterial assembly layer by means of a first method by which a coverage becomes relatively low; and forming a second electrode layer by depositing a conductive material on the first electrode layer by means of a second method by which a coverage becomes relatively high. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012099659(A) 申请公布日期 2012.05.24
申请号 JP20100246525 申请日期 2010.11.02
申请人 TOSHIBA CORP 发明人 AOYAMA KENJI;YAMAMOTO KAZUHIKO;ISHIKAWA SATOSHI;OSHINO SHIGETO
分类号 H01L27/105;H01L27/28;H01L45/00;H01L51/05;H01L51/30 主分类号 H01L27/105
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