发明名称
摘要 The invention relates to a method for manufacturing a single crystal of nitride by epitaxial growth on a support (100) comprising a growth face (105), the method comprising the steps of formation of a sacrificial bed (101) on the support (100), formation of pillars (102) on said sacrificial bed, said pillars being made of a material compatible with GaN epitaxial growth, growth of a nitride crystal layer (103) on the pillars, under growing conditions such that the nitride crystal layer does not extend down to the support in holes (107) formed between the pillars, and removing the nitride crystal layer from the support.
申请公布号 JP2012511489(A) 申请公布日期 2012.05.24
申请号 JP20110539910 申请日期 2008.12.24
申请人 发明人
分类号 C30B29/38;C30B25/02;H01L21/205;H01L21/302 主分类号 C30B29/38
代理机构 代理人
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