VACUUM EXHAUST DEVICE COUPLING STRUCTURE AND VACUUM EXHAUST SYSTEM

摘要

Provided is a coupling structure for a vacuum exhaust device which is a coupling structure for a plurality of vacuum exhaust devices. The plurality of vacuum exhaust devices each has: a casing that forms at least one pump chamber; and an air intake port and an exhaust port that are disposed in the casing and communicate with the pump chamber. The casing for a first vacuum exhaust device among the plurality of vacuum exhaust devices and the casing for a second vacuum exhaust device are directly connected such that the pump chamber in the first vacuum exhaust device and the pump chamber in the second vacuum exhaust device communicate.