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发明名称
摘要
申请公布号
JP4936584(B2)
申请公布日期
2012.05.23
申请号
JP20000246012
申请日期
2000.08.14
申请人
发明人
分类号
C23C14/35;H01J37/34;H01L21/203;H01L21/28;H01L21/285;H05H1/46
主分类号
C23C14/35
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