| 摘要 |
PURPOSE: A two step motion gate valve is provided to minutely adjust exhaust amount from a processing chamber to a vacuum chamber in partial opening by installing an adjusting member to a housing to adjust the top dead center of a first piston which is driven upward and downward inside an upper cylinder. CONSTITUTION: A two step motion gate valve comprises a housing(100), a partition groove(110), a seal plate(200), a first actuator(300), a second actuator(400), and an opening/closing member(500). The housing comprises ports(101) for respectively connecting with a processing chamber and a vacuum chamber. The partition groove is formed in an inner wall of the housing. A through-hole is formed in the center of the seal plate. The first actuator comprises a first piston(310) and a first shaft(320). The second actuator comprises a second piston(410) and a second shaft(420). The opening/closing member is coupled to the lower end of the second shaft to open and close one of the ports.
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