| 摘要 |
PURPOSE: A horizontal contactless deposition apparatus is provided to be easily loaded on a base by a roller of a load lock chamber, thereby increasing the efficiency of a deposition process. CONSTITUTION: A deposition chamber(8) performs a deposition process. A conveyor(9) conveys a substrate in the deposition chamber. A base(10) is formed on the bottom of the deposition chamber. A first support unit is made of a permanent magnet(60) and a magnetic plate(50). A second support unit is formed between the base and the conveyor.
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