| 摘要 |
A vacuum suction head of the present invention can be applied to a large-sized liquid crystal display panel and can reliably suck an object to be sucked even if the object has undulation or flexure. The suction head has a shaft, which holds a suction pad, and gas is charged into and discharged from the suction pad through a suction hole. A casing holds the shaft through first and second springs so as to be movable in the axial direction. Since the suction pad is elastically supported by the springs, the suction pad can reliably suck the object to be sucked having undulation or flexure. The vacuum suction head can be used for a vacuum suction device and a working table.
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