PROBE UNIT

摘要

A probe unit (1) which has a flat-plate-like shape and can connect a semiconductor integrated circuit (100) that has an electrode (101) and a ground electrode (102) respectively formed at an outer peripheral part and the center part of at least one main surface to a circuit board (50) that has, on one surface thereof, an electrode (51) and a ground electrode (52) respectively corresponding to the electrode (101) and the ground electrode (102) of the semiconductor integrated circuit (100), wherein the probe unit is equipped with multiple electrically conductive first contact probes (20) which connect the electrode (102) to the electrode (51), multiple electrically conductive second contact probes (30) which connect the ground electrode (102) to the ground electrode (52) and which have different shapes from those of the first contact probes (20), and a probe holder which holds the first and second contact probes and of which at least the surface has insulating properties.