LIGHT DEFLECTOR, OPTICAL SCANNER, IMAGE FORMING APPARATUS, AND IMAGE PROJECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a light deflector having a micromirror configuration that suppresses change in characteristics thereof due to a transfer of heat to a torsion spring that rotatably supports a mirror part when the mirror part is irradiated with light such as a laser beam.

SOLUTION: A high heat conduction member 40 having thermal conductivity higher than a base material, which is used for manufacturing an elastic support part 20 and a fixing base 30, is laminated and formed on the surface of the elastic support part 20 that swingably supports a mirror part 10 relative to the fixing base 30, as well as on the surface of the fixing base 30. A reflection film formed on the reflection face of the mirror part 10 is also formed integrally with the high heat conduction member 40.

COPYRIGHT: (C)2012,JPO&INPIT