SALT AND PHOTORESIST COMPOSITION COMPRISING THE SAME
摘要
The present invention provides a salt represented by the formula (I): wherein R1, R2, L1, Y, R3, R4, R5, R6, R7, n, s, and R8 represent variables outlined in the specification.
申请公布号
US2012122032(A1)
申请公布日期
2012.05.17
申请号
US201113295943
申请日期
2011.11.14
申请人
ANRYU YUKAKO;ICHIKAWA KOJI;SUMITOMO CHEMICAL COMPANY, LIMITED
